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[IEEE 2006 Sixth IEEE Conference on Nanotechnology - Cincinnati, OH, USA ()] 2006 Sixth IEEE Conference on Nanotechnology - Fabricating Nanoscale Device Features Using the 2-Step NERIME Nanolithography Process
Gilmartin, S.F., Collins, D., Arshak, K., Korostynska, O., Arshak, A.Year:
2006
Language:
english
DOI:
10.1109/nano.2006.247720
File:
PDF, 2.77 MB
english, 2006