[IEEE 2012 25th International Vacuum Nanoelectronics Conference (IVNC) - Jeju, Korea (South) (2012.07.9-2012.07.13)] 25th International Vacuum Nanoelectronics Conference - Preliminary characterization of the ion-sorption micropump
Grzebyk, Tomasz, Gorecka-Drzazga, Anna, Dziuban, Jan A.Year:
2012
Language:
english
DOI:
10.1109/ivnc.2012.6316986
File:
PDF, 136 KB
english, 2012