[IEEE Technical Digest of the 18th International Vacuum...

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[IEEE Technical Digest of the 18th International Vacuum Nanoelectronics Conference - Oxford, UK (10-14 July 2005)] 2005 International Vacuum Nanoelectronics Conference - Application of SEM with microscopic computer tomography (MCT) to detect multilayer structure IC and VNED

Zhuguan Liang,, Ling Xiao,, Yiping Lin,, Wenguo Hu,, Yawen Li,, Kailin Zhou,, Xinghua Hu,, Ping Li,, Jian Wang,, Rau, E.I.
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Year:
2005
Language:
english
DOI:
10.1109/ivnc.2005.1619537
File:
PDF, 523 KB
english, 2005
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