[IEEE 2012 IEEE 62nd Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2012.05.29-2012.06.1)] 2012 IEEE 62nd Electronic Components and Technology Conference - Environmentally friendly dry de-smear of fine-via by ultra high density nonequilibrium atmospheric pressure plasma
Iwata, Yoshiyuki, Sakamoto, Hajime, Takeda, Keigo, Hori, MasaruYear:
2012
Language:
english
DOI:
10.1109/ECTC.2012.6248900
File:
PDF, 985 KB
english, 2012