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Fabrication of PIN diode detectors on thinned silicon...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2004 Vol. 530; Iss. 1-2

Fabrication of PIN diode detectors on thinned silicon wafers

Sabina Ronchin, Maurizio Boscardin, Gian-Franco Dalla Betta, Paolo Gregori, Vittorio Guarnieri, Claudio Piemonte, Nicola Zorzi
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Volume:
530
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2004.05.061
File:
PDF, 282 KB
english, 2004
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