Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
Berdova, Maria, Ylivaara, Oili M. E., Rontu, Ville, Törmä, Pekka T., Puurunen, Riikka L., Franssila, SamiVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4893769
Date:
January, 2015
File:
PDF, 829 KB
english, 2015