Effect of post oxidation anneal on VUV radiation-hardness...

IEEE Transactions on Nuclear Science 1995 / Dec. Vol. 42; Iss. 6

Effect of post oxidation anneal on VUV radiation-hardness of the Si/SiO/sub 2/ system studied by positron annihilation spectroscopy

Clement, M., de Nijs, J.M.M., van Veen, A., Schut, H., Balk, P.
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Volume:
42
Language:
english
Journal:
IEEE Transactions on Nuclear Science
DOI:
10.1109/23.488770
Date:
January, 1995
File:
PDF, 981 KB
english, 1995
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