[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Si nanoprocess for vertical double-gate MOSFET fabrication
Masahara, M., Matsukawa, T., Ishii, K., Yongxun Liu,, Sakamoto, K., Kanemaru, S., Suzuki, E.Year:
2002
Language:
english
DOI:
10.1109/imnc.2002.1178572
File:
PDF, 174 KB
english, 2002