[IEEE International Solid State Sensors and Actuators...

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Micromachined heaters with 1-μs thermal time constants for AFM thermomechanical data storage

Chui, B.W., Mamin, H.J., Terris, B.D., Rugar, D., Goodson, K.E., Kenny, T.W.

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Volume:

Year:

1997

Language:

english

DOI:

10.1109/sensor.1997.635387

File:

PDF, 572 KB

english, 1997

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