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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Micromachined heaters with 1-μs thermal time constants for AFM thermomechanical data storage
Chui, B.W., Mamin, H.J., Terris, B.D., Rugar, D., Goodson, K.E., Kenny, T.W.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.635387
File:
PDF, 572 KB
english, 1997