[IEEE 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Budapest, Hungary (2011.07.3-2011.07.7)] 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Microfabricated PMN-PT on silicon cantilevers with improved static and dynamic piezoelectric actuation: Development, characterization and control

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