Effect of nanoscale heating on electrical transport in RF...

Journal of Microelectromechanical Systems 2005 / 10 Vol. 14; Iss. 5

Effect of nanoscale heating on electrical transport in RF MEMS switch contacts

Jensen, B.D., Chow, L.L.-W., Kuangwei Huang,, Saitou, K., Volakis, J.L., Kurabayashi, K.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.856653
Date:
October, 2005
File:
PDF, 1.33 MB
english, 2005
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