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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Comparative study of novel micromachined accelerometers employing MIDOS
Bochobza-Degani, O., Seter, D.J., Socher, E., Kaldor, S., Scher, E., Nemirovsky, Y.Year:
1999
Language:
english
DOI:
10.1109/memsys.1999.746754
File:
PDF, 1.19 MB
english, 1999