![](/img/cover-not-exists.png)
Temperature-Regulated Nonlinear Microvalves for Self-Adaptive MEMS Cooling
McCarthy, M., Tiliakos, N., Modi, V., Frechette, L.G.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.927742
Date:
August, 2008
File:
PDF, 1.74 MB
english, 2008