Temperature-Regulated Nonlinear Microvalves for...

Journal of Microelectromechanical Systems 2008 / 08 Vol. 17; Iss. 4

Temperature-Regulated Nonlinear Microvalves for Self-Adaptive MEMS Cooling

McCarthy, M., Tiliakos, N., Modi, V., Frechette, L.G.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.927742
Date:
August, 2008
File:
PDF, 1.74 MB
english, 2008
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