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[IEEE IEEE International Conference on Automation Science and Engineering, 2005. - Edmonton, AB, Canada (Aug. 1, 2005)] IEEE International Conference on Automation Science and Engineering, 2005. - Multi-factory optimization enables kit reconfiguration in semiconductor manufacturing

Mike Tao Zhang,, Niu, S., Mai, M., Qi Li,
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Year:
2005
Language:
english
DOI:
10.1109/COASE.2005.1506753
File:
PDF, 256 KB
english, 2005
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