[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Force-balanced accelerometer with mG resolution, fabricated using Silicon Fusion Bonding and Deep Reactive Ion Etching
van Drieenhuizen, B.P., Maluf, N.I., Opris, I.E., Kovacs, G.T.A.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/SENSOR.1997.635447
File:
PDF, 287 KB
english, 1997