Electron Beam Fabrication of Micron Transistors

Electron Beam Fabrication of Micron Transistors

Magdo, S., Hatzakis, M., Ting, C. H.
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Volume:
15
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.156.0446
Date:
November, 1971
File:
PDF, 549 KB
english, 1971
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