[IEEE 2008 66th Annual Device Research Conference (DRC) - Santa Barbara, CA, USA (2008.06.23-2008.06.25)] 2008 Device Research Conference - Self-Aligned Low-Schottky Barrier Deposited Metal S/D MOSFETs with Si3N4 M/Si Passivation
Connelly, Daniel, Clifton, Paul, Faulkner, Carl, Owens, Jordan, Wetzel, JefferyYear:
2008
Language:
english
DOI:
10.1109/drc.2008.4800745
File:
PDF, 1.13 MB
english, 2008