New 3-D Structures Fabricated on Si (hkl) Substrates by...

Journal of Microelectromechanical Systems 2007 / 12 Vol. 16; Iss. 6

New 3-D Structures Fabricated on Si (hkl) Substrates by Bulk Micromachining

Zubel, Irena, Kramkowska, Malgorzata
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.908753
Date:
December, 2007
File:
PDF, 933 KB
english, 2007
Conversion to is in progress
Conversion to is failed