Squeeze air bearing based on ultrasonic oscillation: Motion...

Squeeze air bearing based on ultrasonic oscillation: Motion error compensation using amplitude modulation

Oiwa, Takaaki, Kato, Masaya
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1765762
File:
PDF, 1.32 MB
english, 2004
Conversion to is in progress
Conversion to is failed