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[IEEE 2011 3rd Asia Symposium on Quality Electronic Design (ASQED 2011) - Kuala Lumpur, Malaysia (2011.07.19-2011.07.20)] 2011 3rd Asia Symposium on Quality Electronic Design (ASQED) - Comparison of isotropic dry etching process using XeF2 and ANisotropic Wet Etching Process using EDP for microhotplate device
Tardan, Z., Abdul Halim, Z.Year:
2011
Language:
english
DOI:
10.1109/asqed.2011.6111708
File:
PDF, 1.54 MB
english, 2011