[IEEE 2011 3rd Asia Symposium on Quality Electronic Design (ASQED 2011) - Kuala Lumpur, Malaysia (2011.07.19-2011.07.20)] 2011 3rd Asia Symposium on Quality Electronic Design (ASQED) - Comparison of isotropic dry etching process using XeF2 and ANisotropic Wet Etching Process using EDP for microhotplate device

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