[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - The effect of softbaking temperature on SU-8 photoresist performance
Johari, Shazlina, Tamilchelvan, Nithiyah, Nor, Mohammad Nuzaihan Md, Ramli, Muhammad Mahyiddin, Taib, Bibi Nadia, Mazalan, Mazlee, Wahab, YufridinYear:
2014
Language:
english
DOI:
10.1109/SMELEC.2014.6920899
File:
PDF, 1.32 MB
english, 2014