[Novisibirsk State Tech. Univ IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications - Novosibirsk, Russia (21-23 Sept. 1999)] Proceedings of the IEEE - Russia Conference. 1999 High Power Microwave Electronics: Measurements, Identification, Applications. MIA-ME'99 (Cat. No.99EX289) - Gas discharger generators of ultra-frequency a metal-bearing plasma to etching of piezoelectrics
Orlikov, L.N., Orlikov, N.L., Shandarov, S.M.Year:
1999
Language:
english
DOI:
10.1109/miame.1999.827841
File:
PDF, 170 KB
english, 1999