Polarity-sensitive position controller for MEMS-based...

Polarity-sensitive position controller for MEMS-based radiation sensing

Mark D. Hammig, David K. Wehe
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Volume:
579
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2007.04.020
File:
PDF, 247 KB
english, 2007
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