Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2007 Vol. 579; Iss. 1
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Depth profiling of boron in ultra-shallow junction devices using time-of-flight neutron depth profiling (TOF-NDP)
Sacit M. Çetiner, Kenan ÜnlüVolume:
579
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2007.04.027
File:
PDF, 157 KB
english, 2007