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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - UV curing and photoresist outgassing in high energy implantation
Jones, M.A., Erokhin, Y., Horsky, T., Insalaco, L., Whiteside, D., Slater, S., Buffat, S., Kickel, B., Parrill, T., Jie Jie Xu,Year:
1997
Language:
english
DOI:
10.1109/iit.1996.586179
File:
PDF, 413 KB
english, 1997