A study of monolithic CMOS pixel sensors back-thinning and...

A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

Marco Battaglia, Devis Contarato, Piero Giubilato, Leo Greiner, Lindsay Glesener, Benjamin Hooberman
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Volume:
579
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2007.05.276
File:
PDF, 150 KB
english, 2007
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