[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Critical thickness of diamond-like carbon study using X-ray photoelectron spectroscopy depth profiling
Khamnaulthong, Nattaporn, Siangchaew, Krisda, Limsuwan, PichetYear:
2013
Language:
english
DOI:
10.1109/inec.2013.6465973
File:
PDF, 185 KB
english, 2013