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[IEEE 2013 13th International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2013.06.6-2013.06.7)] 2013 13th International Workshop on Junction Technology (IWJT) - Formation of arsenic segregated Ytterbium and Nickel silicide using microwave annealing
Huang, Ming-Kun, Wu, Wen-Fa, Shih, Chun-Hsing, Chen, Shen-LiYear:
2013
Language:
english
DOI:
10.1109/iwjt.2013.6644499
File:
PDF, 973 KB
english, 2013