[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Evaluation of the change of the residual stress in nano-scale transistors during the deposition and fine patterning processes of thin films
Nakahira, Kota, Tago, Hironori, Kishi, Hiroki, Suzuki, Ken, Miura, Hideo, Yoshimaru, Masaki, Tatsuuma, Ken-ichiroYear:
2011
Language:
english
DOI:
10.1109/esime.2011.5765760
File:
PDF, 2.09 MB
english, 2011