A novel EUV exposure station for nanotechnology studies

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2007 Vol. 582; Iss. 1

A novel EUV exposure station for nanotechnology studies

John Wallace, Yang-Chun Cheng, Artak Isoyan, Quinn Leonard, Mike Fisher, Mike Green, Joseph Bisognano, Paul Nealey, Franco Cerrina
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Volume:
582
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2007.08.124
File:
PDF, 578 KB
english, 2007
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