[IEEE 2011 IEEE 13th Electronics Packaging Technology...

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[IEEE 2011 IEEE 13th Electronics Packaging Technology Conference - (EPTC 2011) - Singapore, Singapore (2011.12.7-2011.12.9)] 2011 IEEE 13th Electronics Packaging Technology Conference - High speed full wafer monitoring of surface, edge and bonding interface for 3Dstacking

Guittet, Pierre-Yves, Markwort, Lars, Savage, Greg, Kappel, Christoph, Halder, Sandip, Phommahaxay, Alain, Jourdain, Anne, Miller, Andy
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Year:
2011
Language:
english
DOI:
10.1109/eptc.2011.6184492
File:
PDF, 1.68 MB
english, 2011
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