Mitigation of Reverse Short-Channel Effect With Multilayer...

IEEE Electron Device Letters 2014 / 8 Vol. 35; Iss. 8

Mitigation of Reverse Short-Channel Effect With Multilayer TiN/Ti/TiN Metal Gates in Gate Last PMOSFETs

Zhao, Lichuan, Tang, Zhaoyun, Tang, Bo, Ma, Xueli, Liu, Jinbiao, Xiang, Jinjuan, Gao, Jianfeng, Li, Chunlong, He, Xiaobin, Jia, Cheng, Ding, Mingzheng, Yang, Hong, Xu, Yefeng, Xu, Jing, Wang, Hongli,
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Volume:
35
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2014.2331356
Date:
August, 2014
File:
PDF, 1021 KB
english, 2014
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