An electrostatic lower stator axial-gap polysilicon wobble...

Journal of Microelectromechanical Systems 1998 / 3 Vol. 7; Iss. 1

An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling

Legtenberg, R., Berenschot, E., van Baar, J., Elwenspoek, M.
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Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.661387
Date:
March, 1998
File:
PDF, 290 KB
english, 1998
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