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Characterizing Voltage Linearity and Leakage Current of High Density $\hbox{Al}_{2}\hbox{O}_{3}/\hbox{HfO}_{2}/\hbox{Al}_{2}\hbox{O}_{3}$ MIM Capacitors
Lee, Sung Kyun, Kim, Kwan Soo, Kim, Soon-Wook, Lee, Dal Jin, Park, Sang Jong, Kim, SibumVolume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2010.2099200
Date:
March, 2011
File:
PDF, 440 KB
english, 2011