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[IEEE 2008 International Conference on Nanoscience and Nanotechnology (ICONN) - Melbourne, Victoria (2008.02.25-2008.02.29)] 2008 International Conference on Nanoscience and Nanotechnology - Finite element simulation of absorbance modulation optical lithography
Foulkes, John, Blaikie, RichardYear:
2008
Language:
english
DOI:
10.1109/iconn.2008.4639277
File:
PDF, 296 KB
english, 2008