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[IEEE 2006 Sixth IEEE Conference on Nanotechnology - Cincinnati, OH, USA ()] 2006 Sixth IEEE Conference on Nanotechnology - A study of the self-assembled mono-layer deposition process for the anti-adhesion of nano-imprint stamps
Kuan-Wei Chen,, Hung-Yi Lin,, Fuh-Yu Chang,, Shuo-Hung Chan,, Tung-Chuan Wu,, Jen-Fin Lin,Year:
2006
Language:
english
DOI:
10.1109/nano.2006.247722
File:
PDF, 2.14 MB
english, 2006