Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2009 Vol. 603; Iss. 1-2
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Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy
N.I. Chkhalo, E.B. Kluenkov, A.E. Pestov, V.N. Polkovnikov, D.G. Raskin, N.N. Salashchenko, L.A. Suslov, M.N. ToropovVolume:
603
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nima.2008.12.160
File:
PDF, 241 KB
english, 2009