An Oxygen Gettering Scheme for Improving Device Mobility...

IEEE Transactions on Nanotechnology 2014 / 9 Vol. 13; Iss. 5

An Oxygen Gettering Scheme for Improving Device Mobility and Subthreshold Swing of InGaZnO-Based Thin-Film Transistor

Hsu, Hsiao-Hsuan, Chang, Chun-Yen, Cheng, Chun-Hu, Chiou, Shan-Haw, Huang, Chiung-Hui, Chiu, Yu-Chien
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2014.2332395
Date:
September, 2014
File:
PDF, 705 KB
english, 2014
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