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[IEEE 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Cambridge, MA, USA (10-12 Sept. 1997)] 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Statistical process simulation with neural network single step feed-back for automatic process monitoring and control
Chen, V.M.C., Yung-Tao Lin,, Yeng-Kaung Peng,Year:
1997
Language:
english
DOI:
10.1109/asmc.1997.630701
File:
PDF, 388 KB
english, 1997