A Process for Inline Minority Carrier Lifetime Monitoring...

IEEE Transactions on Semiconductor Manufacturing 2008 / 05 Vol. 21; Iss. 2

A Process for Inline Minority Carrier Lifetime Monitoring for the Furnace Performing Denuded Zone Formation

Wu, Yung-Hsien, Wang, Chun-Yao, Chang, Chih-Ming, Kuo, Chia-Ming, Ku, Alex
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2008.2000284
Date:
May, 2008
File:
PDF, 1.09 MB
english, 2008
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