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[IEEE 2010 International Symposium on Optomechatronic Technologies (ISOT 2010) - Toronto, ON, Canada (2010.10.25-2010.10.27)] 2010 International Symposium on Optomechatronic Technologies - Compensation of repeatable and nonrepeatable disturbances in high NA SIL-based near-field storage systems
Kim, Jung-Gon, Park, No-CheolYear:
2010
Language:
english
DOI:
10.1109/isot.2010.5687356
File:
PDF, 745 KB
english, 2010