[IEEE 2006 IEEE 4th World Conference on Photovoltaic Energy Conference - Waikoloa, HI (2006.05.7-2006.05.12)] 2006 IEEE 4th World Conference on Photovoltaic Energy Conference - Low-Temperature Fast Growth of Polycrystalline Silicon Thin Film from SiCl4 Light-Diluted Hydrogen by PECVD
Lin, Xuanying, Huang, Rui, Lin, Kuixun, Yu, Yunpeng, Wei, Junhong, Zhu, ZusongYear:
2006
Language:
english
DOI:
10.1109/wcpec.2006.279818
File:
PDF, 672 KB
english, 2006