Influence of RTA and LTA on the Optical Propagation Loss in...

IEEE Photonics Technology Letters 2010 / 04 Vol. 22; Iss. 7

Influence of RTA and LTA on the Optical Propagation Loss in Polycrystalline Silicon Wire Waveguides

Zhu, Shiyang, Lo, G. Q., Ye, J. D., Kwong, D. L.
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Volume:
22
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/lpt.2010.2040992
Date:
April, 2010
File:
PDF, 249 KB
english, 2010
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