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[IEEE IEEE International Integrated Reliability Workshop, 1996. - Lake Tahoe, CA, USA (Oct. 20-23, 1996)] 1996 International Integrated Reliability Workshop Final Report - Electrical characteristics of wedge-shaped gate-oxide in recessed-LOCOS

Young-Tag Woo,, Chi-Sun Hwang,, Sung-Joo Hong,, In-Sul Chung,
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Year:
1996
Language:
english
DOI:
10.1109/IRWS.1996.583380
File:
PDF, 449 KB
english, 1996
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