[IEEE 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - Santa Clara, CA, USA (11-13 Oct. 1999)] 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) - Novel assessment of process control monitor in advanced semiconductor manufacturing: a complete set of addressable failure site test structures (AFS-TS)
Sunnys Hsieh,, Sheng-Che Lin,, Ming-Huei Lee,, Jian-Rong Wang,, Chingfu Lin,, Chia-Wen Huang,, Jye-Yen Cheng,, Yu-Hao Yang,, Doong, K.Y.-Y., Miyamoto, K., Hsu, C.C.-H.Year:
1999
Language:
english
DOI:
10.1109/issm.1999.808781
File:
PDF, 380 KB
english, 1999