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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Experimental study on the dielectric-deformation behavior of SIO2 in a sandwich structure
Jian-Qiu Huang,, Xiao-Dong Huang,, Qing-An Huang,, Ming Qin,Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443691
File:
PDF, 656 KB
english, 2008