Metal oxide targets produced by the polymer-assisted...

Metal oxide targets produced by the polymer-assisted deposition method

Mitch A. Garcia, Mazhar N. Ali, Noel N. Chang, T. Parsons-Moss, Paul D. Ashby, Jacklyn M. Gates, Liv Stavsetra, Kenneth E. Gregorich, Heino Nitsche
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Volume:
613
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2009.09.084
File:
PDF, 380 KB
english, 2010
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