Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2010 Vol. 616; Iss. 2-3
Characterization and calibration of 2nd generation slope measuring profiler
Frank Siewert, Jana Buchheim, Thomas ZeschkeVolume:
616
Year:
2010
Language:
english
Pages:
9
DOI:
10.1016/j.nima.2009.12.033
File:
PDF, 1.26 MB
english, 2010