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[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Optimizing inspection recipe by using virtual inspector virtual analyzer and failure bitmap
Jang, Roma, Dongchul Ihm,, Byoungho Lee,, Poh Boon Yong,, Simon, George, Jian Wu,, Lynch, Graham, Sivaraman, Gangadharan, Chang Ho Lee,Year:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552815
File:
PDF, 767 KB
english, 2013