Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2010 Vol. 621; Iss. 1-3
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Characterization of compact ICP ion source for focused ion beam applications
P.Y. Nabhiraj, Ranjini Menon, G. Mohan Rao, S. Mohan, R.K. BhandariVolume:
621
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2010.04.069
File:
PDF, 735 KB
english, 2010